Fotolitografi: Revizyonlar arasındaki fark

5 kaynak kurtarıldı ve 0 kaynak ölü olarak işaretlendi.) #IABot (v2.0.7
(4 kaynak kurtarıldı ve 0 kaynak ölü olarak işaretlendi.) #IABot (v2.0.7)
(5 kaynak kurtarıldı ve 0 kaynak ölü olarak işaretlendi.) #IABot (v2.0.7)
== Dış bağlantılar ==
* [https://web.archive.org/web/20090506103248/http://www.ee.byu.edu/cleanroom/lithography.phtml BYU Photolithography Resources]
* [http://www.lithoguru.com/scientist/lithobasics.html Semiconductor Lithography] {{Webarşiv|url=https://web.archive.org/web/20170115213753/http://lithoguru.com/scientist/lithobasics.html |tarih=15 Ocak 2017 }} — Overview of lithography
* [http://www.research.ibm.com/journal/rd/411/chiu.html Optical Lithography Introduction]{{Webarşiv|url=https://web.archive.org/web/20051127142407/http://www.research.ibm.com/journal/rd/411/chiu.html |tarih=27 Kasım 2005 }} — IBM site with lithography-related articles
* [http://sst.pennnet.com/Articles/Article_Display.cfm?Section=ARCHI&Subsection=Display&ARTICLE_ID=205024&p=28 Immersion Lithography Article]{{Webarşiv|url=https://web.archive.org/web/20060321174638/http://sst.pennnet.com/Articles/Article_Display.cfm?Section=ARCHI&Subsection=Display&ARTICLE_ID=205024&p=28 |tarih=21 Mart 2006 }} — Shows how depth-of-focus is increased with immersion lithography
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